European Research Ranking Latest Projects www.researchranking.org 2026-04-22T02:54:44+02:00 ERR feed generator 109650 Development of innovative ALD materials and tools for high density 3D integrated capacitors Coordinator: IPDIA, Caen, FR<br>Funding: 1067000.00<br>Start Date: 2013-09-01<br>End Date: 2015-08-31 2013-08-06T00:00:00+02:00 2013-08-06T00:00:00+02:00 49.1844 -0.36109